Through the electromigration experiment , the electromigration resistance of copper interconnection with different width was compared , its mtf and activated energy was calculated , and the failure mechanism was explored . then , difference between copper interconnection and aluminum interconnection was studied 通過(guò)電徙動(dòng)試驗(yàn),研究比較了不同寬度的銅互連線的抗電遷徙能力,計(jì)算了其中值壽命和激活能,探討了其失效機(jī)理,并與鋁互連線進(jìn)行了比較。